1/16/2010	2:02:04 PM	Bypass valve closed
1/16/2010	2:02:05 PM	Main Vac valve closed
1/16/2010	2:02:16 PM	Main Vac valve opened
1/16/2010	2:02:16 PM	Bypass valve opened
1/16/2010	2:02:37 PM	Main Vac valve closed
1/16/2010	2:02:50 PM	Bypass solenoid MFC set to  760.000000
1/16/2010	2:02:58 PM	Bypass valve closed
1/16/2010	2:03:01 PM	Helium valve opened
1/16/2010	2:04:38 PM	Helium valve closed
1/16/2010	2:04:38 PM	H2 valve closed
1/16/2010	2:04:38 PM	BCl3 valve closed
1/16/2010	2:04:38 PM	PH3 valve closed
1/16/2010	2:04:38 PM	SiCl4 pre valve closed
1/16/2010	2:04:38 PM	SiCl4 post valve closed
1/16/2010	2:04:38 PM	Main Vac valve closed
1/16/2010	2:04:38 PM	Bubbler valve closed
1/16/2010	2:04:38 PM	Bypass valve opened
1/16/2010	2:04:38 PM	Helium MFC set to  0.000000
1/16/2010	2:04:38 PM	H2 MFC set to  0.000000
1/16/2010	2:04:38 PM	BCl3 MFC set to  0.000000
1/16/2010	2:04:38 PM	PHl3 MFC set to  0.000000
1/16/2010	2:04:38 PM	SiCl4 MFC set to  0.000000
1/16/2010	2:04:38 PM	Bypass solenoid MFC set to  760.000000
1/16/2010	2:04:38 PM	Tube furnace set to 0
1/16/2010	2:05:04 PM	Baratron reads 904.650805 Torr.  Emergency exit.
1/16/2010	2:05:04 PM	Program exited cleanly
1/16/2010	2:05:05 PM	Program started normally
1/16/2010	2:05:18 PM	Bypass solenoid MFC set to  760.000000
1/16/2010	2:05:19 PM	Bypass valve opened
1/16/2010	2:05:22 PM	Bypass valve closed
1/16/2010	2:05:23 PM	Bypass valve opened
1/16/2010	2:05:25 PM	Bypass valve closed
1/16/2010	2:06:40 PM	Helium MFC set to  500.000000
1/16/2010	2:06:45 PM	Helium valve opened
1/16/2010	2:06:49 PM	Bubbler valve opened
1/16/2010	2:07:22 PM	Bubbler valve closed
1/16/2010	2:07:23 PM	Helium valve closed
1/16/2010	2:14:57 PM	Bypass solenoid MFC set to  0.000000
1/16/2010	2:14:59 PM	Bypass valve opened
1/16/2010	2:15:30 PM	Main Vac valve opened
1/16/2010	2:15:36 PM	Helium MFC set to  95.000000
1/16/2010	2:15:45 PM	Helium MFC set to  190.000000
1/16/2010	2:15:50 PM	H2 MFC set to  10.000000
1/16/2010	2:16:18 PM	Bypass solenoid MFC set to  760.000000
1/16/2010	2:16:21 PM	Main Vac valve closed
1/16/2010	2:16:22 PM	Helium valve opened
1/16/2010	2:16:22 PM	H2 valve opened
1/16/2010	2:19:33 PM	Bypass valve closed
1/16/2010	2:19:37 PM	Bubbler valve opened
1/16/2010	2:44:17 PM	H2 valve closed
1/16/2010	2:56:58 PM	Bubbler valve closed
1/16/2010	2:57:00 PM	Helium valve closed
1/16/2010	4:26:25 PM	Bypass solenoid MFC set to  0.000000
1/16/2010	4:26:26 PM	Bypass valve opened
1/16/2010	4:26:56 PM	Main Vac valve opened
1/16/2010	5:15:12 PM	Bypass valve closed
1/16/2010	5:15:13 PM	Main Vac valve closed
1/16/2010	5:15:30 PM	Bypass valve opened
1/16/2010	5:15:30 PM	Main Vac valve opened
1/16/2010	6:18:28 PM	Bypass valve closed
1/16/2010	6:18:29 PM	Main Vac valve closed
1/16/2010	6:18:52 PM	Bypass valve opened
1/16/2010	6:18:53 PM	Main Vac valve opened
